Jun Zhao
Shanghai Institute of Applied Physics, P R China
Biography
Jun Zhao has completed his Master’s degree from Wuhan University of Technology. He is the Assistant Researcher of Shanghai Synchron Radiation Facility. His research field is focused on the EUV and soft X-ray lithography. He has published more than 10 papers in reputed journals
Abstract
Abstract : A new stitching Soft X-ray interference lithography technique